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微細加工技術 応用編―フォトニクス・エレクトロニクス・メカトロニクスへの応用 (ポリマーフロンティア21シリーズ)
 
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微細加工技術 応用編―フォトニクス・エレクトロニクス・メカトロニクスへの応用 (ポリマーフロンティア21シリーズ) (-)

by 高分子学会行事委員会 (編集)
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内容（「MARC」データベースより）

2003年3月開催の「ポリマーフロンティア21 微細加工技術(応用編)」を講演録として編集。SPMを利用したナノスケールでの加工、高分子材料の微細加工技術と光導波路への適用など6講演を収録。

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